2011, Vol. 28(7): 73202-073202    DOI: 10.1088/0256-307X/28/7/073202
	Laser-Focused Atomic Deposition for Nanascale Grating
	MA Yan**, LI Tong-Bao, WU Wen, XIAO Yi-Li, ZHANG Ping-Ping, GONG Wei-Gang
	Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology, Department of Physics, Tongji University, Shanghai 200092
	收稿日期 2010-07-08  修回日期 1900-01-01
	Supporting info
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