[1] Krishna M G et al 1992 J. Vac. Sci. Technol. A
10 3451

[2] Lubig A et al 1992 Thin Solid Films 217 125

[3] Boulouz M et al 1999 Mater. Sci. Eng. B 67 122

[4] Fukutomi M et al 1994 Thin Solid Films 239 123

[5] Ritala M and Leskela M 1994 Appl. Surf. Sci. 75
333

[6] Chang J T et al 2005 Surf. Coating Technol. 200
1401

[7] Physica C 1997 Superconductivity 282 611

[8] Scardi Paolo, Leoni Matteo and Bertamini Luca 1996
Thin Solid Films 278 96

[9] Sprio S, Guicciardi S, Bellosi A and G. Pezzotti 2006
Surf. Coating Technol. 200 4579

[10] Scardi P, Leoni M, Bertini L and Bertamini L. 1997
Surf. Coating Technol. 94 82

[11] Clyne T W, Gill S C and Thermal J 1996 Spray.
Technol. 5 401

[12] Kesler O, Finot M, Suresh S and Sampath S 1997 Acta
Mater. 45 3123

[13] Leplan H, Robic J Y and Pauleau Y 1996 J. Appl.
Phys. 79 6926

[14] Shao S Y, Fan Z X, Fan R Y and Shao J D 2004 Acta
Opt. Sin. 24 437 (in Chinese)

[15] Morrell R 1985 Handbook of Properties of Technical
and Engineering Ceramics (London: Her Majesty's Stationary Office)
p 154

[16] Chaudhari P 1974 J. Vac. Res. 11 131