2007, Vol. 24(2): 366-369 DOI: | ||
Determination of Tungsten Layer Profiles in Bilayer Structures Using X-Ray Reflectivity Method | ||
XU Yao, WANG Zhan-Shan, WANG Bei, WANG Hong-Chang, WU Wen-Juan, ZHANG Shu-Min, ZHANG Zhong, WANG Feng-Li, QIN Shu-Ji, CHEN Ling-Yan | ||
Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai 200092 | ||
收稿日期 2006-05-15 修回日期 1900-01-01 | ||
Supporting info | ||
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