2007, Vol. 24(3): 774-777    DOI:
Growth of AlGaN Epitaxial Film with High Al Content by Metalorganic Chemical Vapour Deposition
WANG Xiao-Lan, ZHAO De-Gang, YANG Hui, LIANG Jun-Wu
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, PO Box 912, Beijing
收稿日期 2006-11-21  修回日期 1900-01-01
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