2007, Vol. 24(4): 1103-1105    DOI:
Remarkable Resistance Change in Plasma Oxidized TiOx/TiNx Film for Memory Application
WU Liang-Cai, SONG Zhi-Tang, LIU Bo, RAO Feng, XU Cheng, ZHANG Ting,
YIN Wei-Jun, FENG Song-Lin
Nanotechnology Laboratory, Research Center of Functional Semiconductor Film Engineering and Technology, Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai 200050
收稿日期 2006-08-28  修回日期 1900-01-01
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