2007, Vol. 24(6): 1505-1508 DOI: | ||
A Spectroscopic Ellipsometry Study of TiO2 Thin Films Prepared by dc Reactive Magnetron Sputtering: Annealing Temperature Effect | ||
Mati Horprathum1, Pongpan Chindaudom2, Pichet Limsuwan1 | ||
1Department of Physics, Faculty of Science, King Mongkut's University of Technology Thonburi, Bangkok 10140, Thailand2Optical Coating Laboratory, National Electronics and Computer Technology Center, Pathumthani 12120, Thailand | ||
收稿日期 2007-02-20 修回日期 1900-01-01 | ||
Supporting info | ||
[1]Aristides M O and JoseLuis P 2004 5th Ibero-American [2] Jiaguo Yu and Xiujian Z 2000 Mater. Res. Bull. 35 1293 [3] Zeman P and Takabayashi S Thin Solid Films 433 57 [4] Wang T M, Zheng S K, Hao W C and Wang C 2002 Surf. Coat. [5] Gl\"o\ss D, Frach P, Zywitzki O, Modes T, Klinkenberg S and [6] Bhattacharyya D, Sahoo N K, Thakur S and Das N C 2000 Thin [7]Ya-Qi H, Da-Min Z, Gong Z, Ming Z and Min-Sheng W 2003 Appl. [8] Sankapal B R, Lux-Steiner M and Ennaoui A 2005 Appl. Surf. [9] Zywitzki O, Modes T, Sahm H, Frach P, Goedicke K and Gl\"o\ss [10] Nicolas M, Christophe R, Daniel R, Frank P and Ren\'e Mercier 1997 [11] Tompkins H G and McGahan W A 1999 Spectroscopic Ellipsometry [12] Price J, Hung P Y, Rhoad T, Foran B and Diebold [13] Ferlauto A S, Ferreira G M, Pearce J M, Wronski C R, Collins R W, [14] Amassian A, Desjardins P and Martinu L 2004 Thin Solid |
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