| 2007, Vol. 24(6): 1633-1636 DOI: | ||
| Effect of Substrate Bias on Microstructures of Zirconia Thin Films Deposited by Cathodic Vacuum Arc | ||
| LI Xiang-Zhou 1,2, ZHANG Xian-Hui 1,2, HE Ping3, NIU Er-Wu2, XIA Yuan-Yu 1,2, HUANG Jun 1,2, FENG Ke-Cheng1, YANG Si-Ze2 | ||
| 1College of Science, Changchun University of Science and Technology, Changchun 1300222Institute of Physic, Chinese Academy of Sciences, Beijing 1000803 College of Physical Science and Technology, Yunnan University, Kunming650091 | ||
| 收稿日期 2007-03-09 修回日期 1900-01-01 | ||
| Supporting info | ||
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