2007, Vol. 24(12): 3532-3534 DOI: | ||
Structure Characterization of HSQ Films for Low Dielectrics Using D5 as Sacrificial Porous Materials | ||
YIN Gui-Qin, NING Zhao-Yuan, YUAN Qiang-Hua | ||
Department of Physics, Soochow University, Suzhou 215006 | ||
收稿日期 2007-05-03 修回日期 1900-01-01 | ||
Supporting info | ||
[1] Seidel T E and Ting C H 1995 Mater. Res. Soc. Symp. [2] Pai P L and Ting C H 1989 Proc. IEEE VIMC Conference [3] 1997 The Semiconductor Technology Roadmap for [4] Liu P T, Chang T C, Hsu K C, Tseng T Y, Chen L M, Wang C J [5] Gill A 2001 Diam. Relat. Mater 10 234 [6] Maex K, Baklanov M R, Shamiryan D, Iacopi F, Brongersma S [7] Liu P T, Chang T C, Yang Y L, Cheng Y F and Sze S M 2000 [8] Liu P T, Chang T C, Su H, Mor Y S, Yang Y and Chung H, Hou |
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