2007, Vol. 24(12): 3532-3534    DOI:
Structure Characterization of HSQ Films for Low Dielectrics Using D5 as Sacrificial Porous Materials
YIN Gui-Qin, NING Zhao-Yuan, YUAN Qiang-Hua
Department of Physics, Soochow University, Suzhou 215006
收稿日期 2007-05-03  修回日期 1900-01-01
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