2007, Vol. 24(12): 3574-3577    DOI:
High-Speed and Large-Scale Electromagnetically Actuated Resonant MEMS Optical Scanner
MU Can-Jun1,2, ZHANG Fei-Ling3, WU Ya-Ming1
1Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai 2000502Graduate School of the Chinese Academy of Sciences, Beijing 1000493Spansion (China) Co., Ltd. Suzhou 215021
收稿日期 2007-09-11  修回日期 1900-01-01
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