2008, Vol. 25(2): 743-746 DOI: | ||
Determination of Thickness and Optical Constants of ZnO Thin Films Prepared by Filtered Cathode Vacuum Arc Deposition | ||
WANG Ming-Dong1, ZHU Dao-Yun2, LIU Yi3, ZHANG Lin1, ZHENG Chang-Xi1, HE Zhen-Hui1, CHEN Di-Hu1, WEN Li-Shi1 |
||
1State Key Laboratory of Optoelectronic Materials and Technologies, and Department of Physics, School of Physics and Engineering, Sun Yat-Sen University, Guangzhou 5102752Experiment Center, Guangdong University of Technology, Guangzhou 5100903School of Physical Science, Shenzhen University, Shenzhen 518060 | ||
收稿日期 2007-04-04 修回日期 1900-01-01 | ||
Supporting info | ||
[1] Bagnall D M et al 1997 Appl. Phys. Lett. 70 [2] Clarke D R 1999 J. Am. Ceram. Soc. 82 485 [3] {\"{Ozg{\"{ur {\"{U et al 2005 J. Appl. Phys. [4] Sun H D et al 2002 J. Appl. Phys. 91 1993. [5] Sato Y and Sato S 1996 Thin Solid Films [6] Sun X W and Kwok H S 1999 J. Appl. Phys. 86 [7] Ma J et al 1996 Thin Solid Films 279 213 [8] Hoyer P and Weller H 1994 Chem. Phys. Lett. [9] Xu X L et al 2001 Thin Soild Films 398--399 [10] Hu W S et al 2003 J. Phys. Chem. Solids 58 [11] Szcyrbrowski J and Czapla A 1977 Thin Solid Films [12] Vriens L and Rippens W 1983 Appl. Opt. 22 [13] Arndt D P, Azzam R M A and Bennett J M 1984 Appl. [14] Minkov D A 1990 J. Mod. Opt. 37 1977 [15] Swanepoel R 1984 J. Phys. E: Sci. Instrum. 17 [16] Sun X W and Kwok H S 1999 J. Appl. Phys. 86 [17] Tauc (Ed) J 1974 Amorphous and Liquid Semiconductor [18] Sze S M 1969 Physics of Semiconductor Devices (New [19] Yow J L and Chia L T 2006 J. Appl. Phys. 99 |
||