2010, Vol. 27(9): 94207-094207    DOI: 10.1088/0256-307X/27/9/094207
Wafer-Level Testable High-Speed Silicon Microring Modulator Integrated with Grating Couplers

XIAO Xi, ZHU Yu, XU Hai-Hua, ZHOU Liang, HU Ying-Tao, LI Zhi-Yong, LI Yun-Tao, YU Yu-De, YU Jin-Zhong

State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, P.O. Box 912, Beijing 100083
收稿日期 2010-04-12  修回日期 1900-01-01
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