Effect of Parallel-Plate Geometry on Mode Transition Behavior in Argon Microplasmas: Two-Dimensional Simulation
Xiang-Mei Liu1** , Yuan-Hong Song2 , Wei Jiang3 , Wen-Zhu Jia2
1 School of Science, Qiqihar University, Qiqihar 1610062 School of Physics, Dalian University of Technology, Dalian 1160243 School of Physics, Huazhong University of Science and Technology, Wuhan 430074
Abstract ：A two-dimensional self-consistent fluid model is employed to investigate radio-frequency process parameters on the plasma properties in Ar microdischarges. The neutral gas density and temperature balance equations are taken into account. We mainly investigate the effect of the electrode gap on the spatial distribution of the electron density and electron temperature profiles, due to a mode transition from the $\gamma$ regime (secondary electrons emission is responsible for the significant ionization) to the $\alpha$ regime (sheath oscillations and bulk electrons are responsible for sustaining discharge) induced by a sudden decrease of electron density and electron temperature. The pressure, radio-frequency sources frequency and voltage effects on the electron density are also elaborately investigated.
收稿日期: 2018-01-02
出版日期: 2018-03-13
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2018, Vol. 35 
