Dependence of Nitrogen/Argon Reaction Gas Amount on Structural, Mechanical and Optical Properties of Thin WN$_{x}$ Films
Somayeh Asgary, Amir Hoshang Ramezani**
Department of Physics, West Tehran Branch, Islamic Azad University, Tehran, Iran
Abstract ：WN$_{x}$films are deposited by reactive chemical vapor deposition at different amounts of nitrogen in gas mixtures. Experimental data demonstrate that nitrogen amount has a strong effect on microstructure, phase formation, texture morphology, mechanical and optical properties of the WN$_{x}$ films. With increasing nitrogen a phase transition from a single WN phase with low crystallinity structure to a well-mixed crystallized hexagonal WN and face-centered-cubic W$_{2}$N phases appears. Relatively smooth morphology at lower N$_{2}$ concentration changes to a really smooth morphology and then granular with coarse surface at higher N$_{2}$ concentration. The SEM observation clearly shows a columnar structure at lower N$_{2}$ concentration and a dense nanoplates one for higher nitrogen content. The hardness of WN thin films mainly depends on the film microstructure. The absorbance peak position shifts to shorter wavelength continuously with increasing nitrogen amount and decreasing particle size.
收稿日期: 2017-07-28
出版日期: 2017-11-24
:
68.37.-d
(Microscopy of surfaces, interfaces, and thin films)
68.35.Gy
(Mechanical properties; surface strains)
78.20.-e
(Optical properties of bulk materials and thin films)
[1] Toth L E 1971 Transition Metal Carbides and Nitrides (New York: Academic Press) [2] Liu F, Wang T, Shen B, Huang S, Lin F, Ma N et al 2009 Chin. Phys. B 18 1614 [3] Nunez O R, Moreno A J and Tarango 2015 Thin Solid Films 596 160 [4] Becker J S, Suh S, Wang S et al 2003 Chem. Mater. 15 2969 [5] Ham D J and Lee J S 2009 Energies 2 873 [6] Kim K H 2007 Appl. Phys. Lett. 90 212104 [7] Wang S, Yu X, Lin Z, Zhang R et al 2012 Chem. Mater. 24 3023 [8] Lee C and Kim Y 1995 Solid-State Electron. 38 679 [9] Alegre D, Acsente T, Martin-rojo A B et al 2015 Rom. Rep. Phys. 67 532 [10] Hultman L 2000 Vacuum 57 1 [11] Navinsek B, Panjan P and Milsev I 1997 Surf. Coat. Technol. 97 182 [12] Chakrapani V, Thangala J and Sunkara M K 2009 Int. J. Hydrogen Energy 34 9050 [13] Byon E, Oates T H and Anders A 2003 Appl. Phys. Lett. 82 1634 [14] Shen Y G and Mai Y W 2000 Appl. Surf. Sci. 167 59 [15] Khitrova V I 1961 Sov. Phys. Crystallogr. 5 679 [16] Khitrova V I 1962 Sov. Phys. Crystallogr. 6 439 [17] Khitrova V I 1962 Sov. Phys. Crystallogr. 5 712 [18] Polcar T, Parreira N M and Cavaleiro A 2007 Wear 262 655 [19] Asgary S, Hantehzadeh M, Ghoranneviss M and Boochai A 2013 Rare Metals ISSN1001-0521 [20] Dirks A G, Wolters R A M and De Veirman A E M 1992 Thin Solid Films 208 181 [21] Polcar T, Parreira N M and Cavaleiro A 2008 Wear 265 319 [22] Wen M, Meng Q N, Yu W X, Zheng W T et al 2010 Surf. Coat. Technol. 205 1953 [23] Shen Y G 2003 Mater. Sci. Eng. A 359 158 [24] Tsai K, Wu W, Chen J et al 2004 J. Vac. Sci. Technol. B 22 993 [25] Wang C Y and beckermann C 1994 Metallurgical and Materials Transactions A 25 1081 [26] Gratacos E I, Lewi L, Muñoz B et al 2007 Ultrasound Obstet Gynecol 30 28 [27] Shtansky D V, Levashov E A, Shaveiko A N et al 1999 Metall. Mater. Trans. A 30 2439 [28] Yamamoto T, Kawate M, Hasegawa H et al 2005 Surf. Coat. Technol. 193 372 [29] Hones P, Martin N, Regula M et al 2003 J. Phys. D 36 1023 [30] Maille L, Aubert P, Sant C et al 2004 Surf. Coat. Technol. 180 483 [31] Gupta P and Ramrakhiani M 2009 Open Nanoscience J. 3 15
[1]
.
[2]
.
[3]
.
[4]
.
[5]
.
[6]
.
[7]
.
[8]
.
[9]
.
[10]
.
[11]
.
[12]
.
[13]
.
[14]
.
[15]
.
2017, Vol. 34 
