1Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, China Electronic Product Reliability and Environmental Testing Research Institute, Guangzhou 510610 2School of Electronic and Information Engineering, South China University of Technology, Guangzhou 510641
Abstract：Total ionizing dose effect induced low frequency degradations in 130 nm partially depleted silicon-on-insulator (SOI) technology are studied by $^{60}$Co $\gamma$-ray irradiation. The experimental results show that the flicker noise at the front gate is not affected by the radiation since the radiation induced trapped charge in the thin gate oxide can be ignored. However, both the Lorenz spectrum noise, which is related to the linear kink effect (LKE) at the front gate, and the flicker noise at the back gate are sensitive to radiation. The radiation induced trapped charge in shallow trench isolation and the buried oxide can deplete the nearby body region and can activate the traps which reside in the depletion region. These traps act as a GR center and accelerate the consumption of the accumulated holes in the floating body. It results in the attenuation of the LKE and the increase of the Lorenz spectrum noise. Simultaneously, the radiation induced trapped charge in the buried oxide can directly lead to an enhanced flicker noise at the back gate. The trapped charge density in the buried oxide is extracted to increase from $2.21\times10^{18}$ eV$^{-1}$cm$^{-3}$ to $3.59\times10^{18}$ eV$^{-1}$cm$^{-3}$ after irradiation.
2017, Vol. 34 
