Fabrication of InAlGaN/GaN High Electron Mobility Transistors on Sapphire Substrates by Pulsed Metal Organic Chemical Vapor Deposition
Ru-Dai Quan, Jin-Cheng Zhang** , Ya-Chao Zhang, Wei-Hang Zhang, Ze-Yang Ren, Yue Hao
Key Laboratory of Wide Band-Gap Semiconductor Technology, School of Microelectronics, Xidian University, Xi'an 710071
Abstract ：Nearly lattice-matched InAlGaN/GaN heterostructure is grown on sapphire substrates by pulsed metal organic chemical vapor deposition and excellent high electron mobility transistors are fabricated on this heterostructure. The electron mobility is 1668.08 cm$^{2}$/V$\cdot$s together with a high two-dimensional-electron-gas density of $1.43\times10^{13}$ cm$^{-2}$ for the InAlGaN/GaN heterostructure of 20 nm InAlGaN quaternary barrier. High electron mobility transistors with gate dimensions of $1\times50$ μm$^{2}$ and 4 μm source-drain distance exhibit the maximum drain current of 763.91 mA/mm, the maximum extrinsic transconductance of 163.13 mS/mm, and current gain and maximum oscillation cutoff frequencies of 11 GHz and 21 GHz, respectively.
收稿日期: 2016-06-29
出版日期: 2016-10-27
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2016, Vol. 33 
