中国物理快报  2015, Vol. 32 Issue (10): 104204-104204    DOI: 10.1088/0256-307X/32/10/104204
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Polarization Stable Vertical Cavity Surface Emitting Laser Array Based on Proton Implantation
XUN Meng1, XU Chen1**, XIE Yi-Yang1,2, DENG Jun1, XU Kun1, JIANG Guo-Qing1, PAN Guan-Zhong1, CHEN Hong-Da2
1Key Laboratory of Optoelectronics Technology (Ministry of Education), Beijing University of Technology, Beijing 100124
2State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083