Optical Properties and Surface Morphology of Thin Silver Films Deposited by Thermal Evaporation
ZHOU Ming1** , LI Yao-Peng1 , ZHOU Sheng1 , LIU Ding-Quan1,2
1 Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 2000832 School of Physical Science and Technology, ShanghaiTech University, Shanghai 200031
Abstract :Thin silver films with different thicknesses are deposited by thermal evaporation, and the Drude–Lorentz mode is used to describe the optical properties of samples measured by an ellipsometer, and the thickness uniqueness analysis and reflection spectrum testing are used to verify the simulated results. We obtain the surface morphologies of the samples using the scanning electron microscopy, and calculate the relationship of reflectance with film thickness at wavelength 800 nm using the Mathcad software. Moreover, the effective medium approximation mode is used to explain the differences of wavelength-dependent n and k as the thickness changes. As the silver film thickness decreases, the optical constant changes regularly, and the films show flat surface, small cracks, discontinuous and island distribution, respectively, while n and k of the island distributed silver film have an intersection point in the visible spectrum. Our experiments provide an in-depth research for the ultra-thin silver film under thermal evaporation deposition, and will be helpful for its application in multilayers and plasmonic devices.
收稿日期: 2015-04-16
出版日期: 2015-07-30
:
78.66.Bz
(Metals and metallic alloys)
73.20.Mf
(Collective excitations (including excitons, polarons, plasmons and other charge-density excitations))
[1] Amotchkina T V, Janicki V, Sancho-Parramon J, Tikhonravov A V, Trubetskov M K and Zorc H 2011 Appl. Opt. 50 1453 [2] Gladskikh I A, Leonov N B, Przhibel'ski? S G and Vartanyan T A 2014 J. Opt. Technol. 81 280 [3] Li H, Sheng C X and Chen Q 2012 Chin. Phys. Lett. 29 054201 [4] Xu X H, Zhou L P, Peng K, Zhu J J, Li D Y and Li S L 2013 Mater. Mech. Eng. 37 49 (in Chinese) [5] Makino N, Mukai K and Kataoka Y 1997 Appl. Spectrosc. 51 1460 [6] West P R, Ishii S, Naik G V, Emani N K, Shalaev V M and Boltasseva A 2010 Laser Photon. Rev. 4 795 [7] Wang P, Wang R Y, Jin J Y, Xu L and Shi Q F 2012 Chin. Phys. Lett. 29 017805 [8] Wang J F, Li H J, Zhou Z Y, Li X Y, Liu J and Yang H Y 2010 Chin. Phys. B 19 117310 [9] Li G L, Zhen H Y, Huang Z Y, Li K, Shen W D and Liu X 2012 Chin. Opt. Lett. 10 012401 [10] Sun X L, Hong R J, Hou H H, Fan Z X and Shao J D 2007 Thin Solid Films 515 6962 [11] Xiong Y Q, Wu H, Guo Y, Sun Y, Yang D Q and Da D A 2000 Thin Solid Films 375 300 [12] Lee C C, Lee T Y and Jen Y J 2000 Thin Solid Films 359 95 [13] Lon?ri? M, Sancho-Parramon J, Pavlovi? M, Zorc H, Dubc k P, Turkovi? A, Bernstorff S, Jakopic G and Haase A 2009 Vacuum 84 188 [14] Singer R R, Leitner A and Aussenegg F R 1995 J. Opt. Soc. Am. B 12 220 [15] Wang B K, Li Y, Shi J M and Liu Y F 1993 J. Quantum Electron. 10 36 (in Chinese) [16] Oates T W H, Ryves L and Bilek M M M 2008 Opt. Express 16 2302 [17] Battie Y, Destouches N, Chassagneux F, Jamon D, Bois L, Moncoffre N and Toulhoat N 2011 Opt. Mater. Express 1 1019 [18] Naik G V, Shalaev V M and Boltasseva A 2013 Adv. Mater. 25 3264 [19] Palik E D 1991 Handbook of Optical Constants of Solids (New York: Academic) [20] Macleod H A et al 2001 Thin Film Optical Filters 3rd edn (London: Taylor & Francis) [21] Bagley J Q, Wu B P and Tsang L 2009 J. Opt. Soc. Am. A 26 2362 [22] Leftheriotis G, Yianoulis P and Patrikios D 1997 Thin Solid Films 306 92 [23] Ma Y W, Wu Z W, Zhang L H and Zhang J 2010 Chin. Phys. Lett. 27 024207 [24] Santbergen R, Temple T L, Liang R, Smets A H M, Swaaij R A C M M and Zeman M 2012 J. Opt. 14 024010 [25] Das P K, Li X G and Liu Z S 2010 Appl. Energy 87 2785
[1]
. [J]. 中国物理快报, 2019, 36(1): 14202-.
[2]
. [J]. 中国物理快报, 2018, 35(2): 27701-.
[3]
. [J]. 中国物理快报, 2016, 33(07): 74201-074201.
[4]
. [J]. 中国物理快报, 2015, 32(09): 94204-094204.
[5]
LI Heng,SHENG Chuan-Xiang**,CHEN Qian. Optical Bistability in Ag/Dielectric Multilayers [J]. 中国物理快报, 2012, 29(5): 54201-054201.
[6]
YAO Jie,YE Yong-Hong**. Super-Resolution Imaging by using a Metallic Rod Array in the Near Infrared Region [J]. 中国物理快报, 2012, 29(4): 47802-047802.
[7]
LIU Ling;XU Xiao-Liang**;LEI Jie-Mei;YIN Nai-Qiang. Nanostructured Metal-Enhanced Photoluminescence of Micro-Sr2 Si5 N8 :Eu2+ Phosphors [J]. 中国物理快报, 2012, 29(1): 17801-017801.
[8]
MA Feng-Ying;SU Jian-Po**;GONG Qiao-Xia;YANG Jing;DU Yan-Li;GUO Mao-Tian;YUAN Bin
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[9]
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