Abstract：We present a new type of gas piezoelectric sensor taking quartz piezoelectric crystal as the basal material and nanometer nonmetallic polymer thin film coating as the surface. The coating, plated by vacuum electron beam dispersion (EBD) coating technology, is carried out by employing a nanometer nonmetallic polymer thin film that has properties of selecting and identifying characteristic materials. An experimental survey shows that EBD coating technology can produce a uniform thickness of the thin film coating, and the physical and chemical analyses show that the coating has a high performance of absorption using the method of infrared spectroscopy. Meanwhile, the absorption and sensitivity performance of the thin film coating will change if other organic materials are added to the coated thin film. Through the measurement of the thin film coating, the feature of sensitivity to the change of humidity is acquired. Based on the above description, a new type of gas piezoelectric sensor is designed and manufactured reasonably, which provides a valid method to rapidly monitor and distinguish complex gases.
(Methods of deposition of films and coatings; film growth and epitaxy)
引用本文:
. [J]. 中国物理快报, 2013, 30(10): 108101-108101.
GU Yu, LI Qiang, TIAN Fang-Fang, XU Bao-Jun. Structure and Absorbability of a Nanometer Nonmetallic Polymer Thin Film Coating on Quartz Used in Piezoelectric Sensors. Chin. Phys. Lett., 2013, 30(10): 108101-108101.
2013, Vol. 30 
