中国物理快报  2013, Vol. 30 Issue (9): 98103-098103    DOI: 10.1088/0256-307X/30/9/098103
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Effect of Cations on the Chemical Mechanical Polishing of SiO2 Film
SONG Han**, WANG Liang-Yong, LIU Wei-Li, SONG Zhi-Tang
State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050