Graphene Domains Synthesized on Electroplated Copper by Chemical Vapor Deposition
WANG Wen-Rong1,2, LIANG Chen1,2, LI Tie1**, YANG Heng1, LU Na1, WANG Yue-Lin1**
1State Key Laboratories of Transducer Technology, Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050 2University of Chinese Academy of Sciences, Beijing 100049
Abstract：Electroplated Cu, which can be compatible with integrated circuit technology and large-scale silicon wafers, is explored as a substrate to synthesize graphene domains by ambient-pressure chemical vapor deposition. Hexagonal single crystal domains of graphene are synthesized on electroplated Cu under dilute methane gas flow. Scanning electron microscopy images of graphene domains grown on electroplated Cu indicate that the domain size is time-dependent, and the domains can cross Cu grain boundaries and are distributed more uniformly on electroplated Cu surface than those grown on Cu foil.
. [J]. Chin. Phys. Lett., 2013, 30(2): 28102-028102.
WANG Wen-Rong, LIANG Chen, LI Tie, YANG Heng, LU Na, WANG Yue-Lin. Graphene Domains Synthesized on Electroplated Copper by Chemical Vapor Deposition. Chin. Phys. Lett., 2013, 30(2): 28102-028102.
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2013, Vol. 30 
