Chin. Phys. Lett.  2012, Vol. 29 Issue (12): 127701-127701    DOI: 10.1088/0256-307X/29/12/127701
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Ultrasonic Energy Transference Based on an MEMS ZnO Film Array
WU Shao-Hua1,2, ZHAO Zhan1**, ZHAO Jun-Juan1,2, GUO Li-Jun1,2, DU Li-Dong1, FANG Zhen1, KONG De-Yi3, XIAO Li1,2, GAO Zhong-Hua1,2
1State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190
2Graduate University of Chinese Academy of Sciences, Beijing 100049
3State Key Laboratory of Transducer Technology, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031