Ultrasonic Energy Transference Based on an MEMS ZnO Film Array
WU Shao-Hua1,2, ZHAO Zhan1**, ZHAO Jun-Juan1,2, GUO Li-Jun1,2, DU Li-Dong1, FANG Zhen1, KONG De-Yi3, XIAO Li1,2, GAO Zhong-Hua1,2
1State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190 2Graduate University of Chinese Academy of Sciences, Beijing 100049 3State Key Laboratory of Transducer Technology, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031
Abstract：An ultrasonic energy transference system with a ZnO square piezoelectric thin-film array (SPTFA) structure is presented. The design principle of the system is analyzed, and a device with the SPTFA structure is successfully fabricated based on MEMS processes. The characteristics of the energy transference system are investigated in detail. The experimental results reveal that the resonant frequency of the system is 13 MHz, the maximum voltage of the receiving end reaches 10.87 V when the amplitude of excitation voltage is 10 V, at that time the output power of system is 5.377 mW, and power density is 2.581 mW/cm2. The light emitting diode is lit successfully by the system in a distance of 3 mm.
2012, Vol. 29 
