Ultrathin Carbon Films Prepared by Negative Cluster-Beam Technology
ZHANG Zao-Di, WANG Ze-Song, WANG Shi-Xu, FU De-Jun**
Accelerator Laboratory, School of Physics and Technology and Key Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education of China, Wuhan University, Wuhan 430072
Ultrathin Carbon Films Prepared by Negative Cluster-Beam Technology
ZHANG Zao-Di, WANG Ze-Song, WANG Shi-Xu, FU De-Jun**
Accelerator Laboratory, School of Physics and Technology and Key Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education of China, Wuhan University, Wuhan 430072
We develop a miniaturized chamber installed on a tandetron accelerator into which negative ions of small carbon clusters are transported. Negative clusters C1−− C10−are obtained with beam currents of 1–104 nA at energies of 10–20 keV. C2−eams of 0.2 µA are used to directly deposit carbon films on SiO2/Si substrates. Formation of ultrathin carbon films are demonstrated by Raman scattering, which reveals the evolution of the graphitic peak (1550 cm−2) with deposition time.
We develop a miniaturized chamber installed on a tandetron accelerator into which negative ions of small carbon clusters are transported. Negative clusters C1−− C10− are obtained with beam currents of 1–104 nA at energies of 10–20 keV. C2− beams of 0.2 µA are used to directly deposit carbon films on SiO2/Si substrates. Formation of ultrathin carbon films are demonstrated by Raman scattering, which reveals the evolution of the graphitic peak (1550 cm−2) with deposition time.
ZHANG Zao-Di, WANG Ze-Song, WANG Shi-Xu, FU De-Jun. Ultrathin Carbon Films Prepared by Negative Cluster-Beam Technology[J]. 中国物理快报, 2012, 29(7): 78101-078101.
ZHANG Zao-Di, WANG Ze-Song, WANG Shi-Xu, FU De-Jun. Ultrathin Carbon Films Prepared by Negative Cluster-Beam Technology. Chin. Phys. Lett., 2012, 29(7): 78101-078101.
2012, Vol. 29 
