1Faculty of Civil and Transportation Engineering, Guangdong University of Technology, Guangzhou 510006 2AML, Department of Engineering Mechanics, Tsinghua University, Beijing 100084 3Department of Mechanics, School of Mechanical Engineering, Tianjin University, Tianjin 300072
Chemisorption-Induced Resonance Frequency Shift of a Microcantilever
1Faculty of Civil and Transportation Engineering, Guangdong University of Technology, Guangzhou 510006 2AML, Department of Engineering Mechanics, Tsinghua University, Beijing 100084 3Department of Mechanics, School of Mechanical Engineering, Tianjin University, Tianjin 300072
摘要The autonomy and property of atoms/molecules adsorbed on the surface of a microcantilever can be probed by measuring its resonance frequency shift due to adsorption. The resonance frequency change of a cantilever induced by chemisorption is theoretically studied. Oxygen chemisorbed on the Si(100) surface is taken as a representative example. We demonstrate that the resonant response of the cantilever is mainly determined by the chemisorption-induced bending stiffness variation, which depends on the bond configurations formed by the adsorbed atoms and substrate atoms. This study is helpful for optimal design of microcantilever-based sensors for various applications.
Abstract：The autonomy and property of atoms/molecules adsorbed on the surface of a microcantilever can be probed by measuring its resonance frequency shift due to adsorption. The resonance frequency change of a cantilever induced by chemisorption is theoretically studied. Oxygen chemisorbed on the Si(100) surface is taken as a representative example. We demonstrate that the resonant response of the cantilever is mainly determined by the chemisorption-induced bending stiffness variation, which depends on the bond configurations formed by the adsorbed atoms and substrate atoms. This study is helpful for optimal design of microcantilever-based sensors for various applications.
2012, Vol. 29 
