Effect of Annealing Temperature on the Structural and Electrical Properties of a−Axis-Oriented SrTiO3 Films
WANG Xiao-Fei1, 3**,HU Qiu-Bo2,LI Li-Ben1, 3,CHEN Qing-Dong1, 3,WANG Hui-Xian1, 3
1School of Physics and Engineering, Henan University of Science and Technology, Luoyang 471003 2Department of Mathematics and Science, Luoyang Institute of Science and Technology, Luoyang 471023 3Luoyang Key Laboratory of Photonic and Electronic Materials, Luoyang 471003
Effect of Annealing Temperature on the Structural and Electrical Properties of a−Axis-Oriented SrTiO3 Films
WANG Xiao-Fei1, 3**,HU Qiu-Bo2,LI Li-Ben1, 3,CHEN Qing-Dong1, 3,WANG Hui-Xian1, 3
1School of Physics and Engineering, Henan University of Science and Technology, Luoyang 471003 2Department of Mathematics and Science, Luoyang Institute of Science and Technology, Luoyang 471023 3Luoyang Key Laboratory of Photonic and Electronic Materials, Luoyang 471003
Strontium titanate films with high a−axis-orientation [a(100)=94.1%] were deposited on (111) Pt/Ti/SiO2/Si substrates by the metal organic deposition process. X−ray diffraction shows that the degree of a-axis orientation increases with increasing annealing temperature. It is found that the dielectric properties are improved by a higher annealing temperature, while the leakage currents are also enhanced, and the possible causes of temperature dependence are discussed.
Strontium titanate films with high a−axis-orientation [a(100)=94.1%] were deposited on (111) Pt/Ti/SiO2/Si substrates by the metal organic deposition process. X−ray diffraction shows that the degree of a-axis orientation increases with increasing annealing temperature. It is found that the dielectric properties are improved by a higher annealing temperature, while the leakage currents are also enhanced, and the possible causes of temperature dependence are discussed.
WANG Xiao-Fei,**,HU Qiu-Bo,LI Li-Ben,CHEN Qing-Dong,WANG Hui-Xian,. Effect of Annealing Temperature on the Structural and Electrical Properties of a−Axis-Oriented SrTiO3 Films[J]. 中国物理快报, 2012, 29(5): 56101-056101.
WANG Xiao-Fei,**,HU Qiu-Bo,LI Li-Ben,CHEN Qing-Dong,WANG Hui-Xian,. Effect of Annealing Temperature on the Structural and Electrical Properties of a−Axis-Oriented SrTiO3 Films. Chin. Phys. Lett., 2012, 29(5): 56101-056101.
2012, Vol. 29 
