Helium-Related Defect Evolution in Titanium Films by Slow Positron Beam Analysis
LI Yue1,DENG Ai-Hong1,2**,ZHOU Yu-Lu2,ZHOU Bing1,WANG Kang1,HOU Qing2,SHI Li-Qun3,QIN Xiu-Bo4,WANG Bao-Yi4
1Department of Physics, Sichuan University, Chengdu 610064 2Key Laboratory of Radiation Physics and Technology of Ministry of Education, Institute of Nuclear Science and Technology, Sichuan University, Chengdu 610064 3Institute of Modern Physics, Fudan University, Shanghai 200433 4Laboratory of Nuclear Analysis Technique, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049
Helium-Related Defect Evolution in Titanium Films by Slow Positron Beam Analysis
LI Yue1,DENG Ai-Hong1,2**,ZHOU Yu-Lu2,ZHOU Bing1,WANG Kang1,HOU Qing2,SHI Li-Qun3,QIN Xiu-Bo4,WANG Bao-Yi4
1Department of Physics, Sichuan University, Chengdu 610064 2Key Laboratory of Radiation Physics and Technology of Ministry of Education, Institute of Nuclear Science and Technology, Sichuan University, Chengdu 610064 3Institute of Modern Physics, Fudan University, Shanghai 200433 4Laboratory of Nuclear Analysis Technique, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049
摘要Various helium-containing titanium films were deposited on Si substrates by magnetron sputtering under different helium/argon (He/Ar) ambiances. Helium concentrations and corresponding depth profiles in the Ti films are obtained by elastic recoil detection analysis (ERDA). X-ray diffraction (XRD) measurements are carried out to evaluate the crystallization of the titanium films. Vacancy-type defects and their depth profiles were revealed by slow positron beam analysis (SPBA). It is found that the defect-characteristic parameter S rises with the increment of the He/Ar flow ratios. The variation of S indicates the formation and evolution of various He-related defects, with uniform distribution into the depth around 400 nm.
Abstract：Various helium-containing titanium films were deposited on Si substrates by magnetron sputtering under different helium/argon (He/Ar) ambiances. Helium concentrations and corresponding depth profiles in the Ti films are obtained by elastic recoil detection analysis (ERDA). X-ray diffraction (XRD) measurements are carried out to evaluate the crystallization of the titanium films. Vacancy-type defects and their depth profiles were revealed by slow positron beam analysis (SPBA). It is found that the defect-characteristic parameter S rises with the increment of the He/Ar flow ratios. The variation of S indicates the formation and evolution of various He-related defects, with uniform distribution into the depth around 400 nm.
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2012, Vol. 29 
