Fast Evaluation of Aberration-Induced Intensity Distribution in Partially Coherent Imaging Systems by Cross Triple Correlation
LIU Shi-Yuan1,2**, LIU Wei1, WU Xiao-Fei2
1Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074 2State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074
Fast Evaluation of Aberration-Induced Intensity Distribution in Partially Coherent Imaging Systems by Cross Triple Correlation
LIU Shi-Yuan1,2**, LIU Wei1, WU Xiao-Fei2
1Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074 2State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074
摘要We propose a method suitable for the fast calculation and evaluation of aberration-induced intensity distribution in partially coherent imaging systems, such as projection lithographic tools. The method is based on transmission cross coefficient (TCC) decomposition by a general operator, namely cross triple correlation (CTC). By expanding the aberrated pupil function into a Taylor series, the TCC is decomposed into different terms. Each term is further represented as a weighted sum of several CTCs. By exploring the properties of CTC, the aerial image intensity induced by wavefront aberration is calculated quickly and separated clearly from that without aberration. Simulation results and discussion are presented.
Abstract：We propose a method suitable for the fast calculation and evaluation of aberration-induced intensity distribution in partially coherent imaging systems, such as projection lithographic tools. The method is based on transmission cross coefficient (TCC) decomposition by a general operator, namely cross triple correlation (CTC). By expanding the aberrated pupil function into a Taylor series, the TCC is decomposed into different terms. Each term is further represented as a weighted sum of several CTCs. By exploring the properties of CTC, the aerial image intensity induced by wavefront aberration is calculated quickly and separated clearly from that without aberration. Simulation results and discussion are presented.
LIU Shi-Yuan;**;LIU Wei;WU Xiao-Fei
. Fast Evaluation of Aberration-Induced Intensity Distribution in Partially Coherent Imaging Systems by Cross Triple Correlation[J]. 中国物理快报, 2011, 28(10): 104212-104212.
LIU Shi-Yuan, **, LIU Wei, WU Xiao-Fei
. Fast Evaluation of Aberration-Induced Intensity Distribution in Partially Coherent Imaging Systems by Cross Triple Correlation. Chin. Phys. Lett., 2011, 28(10): 104212-104212.
[1] Smith B W and Schlief R 2000 Proc. SPIE 4000 294
[2] Yuan Q Y, Wang X Z, Qiu Z C, Wang F, Ma M Y and He L 2007 Opt. Express 15 15878
[3] Liu W, Liu S Y, Zhou T T and Wang L J 2009 Opt. Express 17 19278
[4] Liu W, Liu S Y, Shi T L and Tang Z R 2010 Opt. Express 18 20096
[5] Saleh B E A 1979 Opt. Acta 26 777
[6] Kintner E C 1978 Appl. Opt. 17 2747
[7] Yamazoe K 2010 J. Opt. Soc. Am. A 27 1311
[8] Liu S Y, Liu W and Zhou T T 2011 J. Micro/Nanolith. MEMS MOEMS 10 023007
[9] Flagello D G, Klerk J, Davies G, Rogoff R, Geh B, Arnz M, Wegmann U and Kraemer M 1997 Proc. SPIE 3051 672
[10] Lohmann A W and Wirnitzer B 1984 Proc. IEEE 72 889
[11] Hopkins H H 1953 Proc. R. Soc. London A 217 408
[12] Zernike F 1934 Physica 1 689
[13] Yu P, Qiu W and Pan D Z 2008 IEEE Trans. Semicond. Manuf. 21 638
[14] Pati Y C and Kailath T 1994 J. Opt. Soc. Am. A 11 2438
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