Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate
ZHOU Yan1, WANG Hai-Long1**, MA Chuan-He1,2, GONG Qian2, FENG Song-Lin2
1 Shandong Provincial Key Laboratory of Laser Polarization and Information Technology, Department of Physics, Qufu Normal University, Qufu 273165 2 State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai 200050
Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate
ZHOU Yan1, WANG Hai-Long1**, MA Chuan-He1,2, GONG Qian2, FENG Song-Lin2
1 Shandong Provincial Key Laboratory of Laser Polarization and Information Technology, Department of Physics, Qufu Normal University, Qufu 273165 2 State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai 200050
摘要Hinged mirror arrays are widely utilized for display applications and optical communication. They can be fabricated by an self-assembly technique using the strain in lattice-mismatched epitaxial layers. A multilayer structure including a strain-compensated layer, a digital alloy sacrificial layer and a strain bilayer, is grown by molecular-beam epitaxy. Self-assembly hinged mirrors on a GaAs substrate have been successfully fabricated by photolithography and selective etching. The hinge fabrication method with a strain bilayer is simple and flexible. Structures formed by multiple hinged plates will enable the self-assembly of more complex three-dimensional microstructures.
Abstract：Hinged mirror arrays are widely utilized for display applications and optical communication. They can be fabricated by an self-assembly technique using the strain in lattice-mismatched epitaxial layers. A multilayer structure including a strain-compensated layer, a digital alloy sacrificial layer and a strain bilayer, is grown by molecular-beam epitaxy. Self-assembly hinged mirrors on a GaAs substrate have been successfully fabricated by photolithography and selective etching. The hinge fabrication method with a strain bilayer is simple and flexible. Structures formed by multiple hinged plates will enable the self-assembly of more complex three-dimensional microstructures.
ZHOU Yan;WANG Hai-Long**;MA Chuan-He;GONG Qian;FENG Song-Lin
. Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate[J]. 中国物理快报, 2011, 28(7): 78102-078102.
ZHOU Yan, WANG Hai-Long**, MA Chuan-He, GONG Qian, FENG Song-Lin
. Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate. Chin. Phys. Lett., 2011, 28(7): 78102-078102.
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2011, Vol. 28 
