Effect of a Boron Underlayer on the Ordering and Orientation of Sputtered FePt Film
LI Yong-Le1, HUANG An-Ping2, FENG Tang-Fu1, CHEN Qiang1, SHU Xiao-Lin1, CHEN Jun-Yang3, CHEN Zi-Yu1,2**
1Department of Physics, Beihang University, Beijing 100191 2Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education), Beihang University, Beijing 100191 3Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190
Effect of a Boron Underlayer on the Ordering and Orientation of Sputtered FePt Film
LI Yong-Le1, HUANG An-Ping2, FENG Tang-Fu1, CHEN Qiang1, SHU Xiao-Lin1, CHEN Jun-Yang3, CHEN Zi-Yu1,2**
1Department of Physics, Beihang University, Beijing 100191 2Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education), Beihang University, Beijing 100191 3Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190
摘要FePt multilayer films with a boron underlayer are prepared on Si (100) substrates using magnetron sputtering and vacuum annealing is carried out to obtain the hard magnetic L10 phase. According to the microstructural and magnetic measurement results, the ordering of the FePt films is facilitated at low annealing temperatures while it is blocked at high ones by introducing boron. Moreover, (001) orientation of the samples is obviously improved by inserting a boron underlayer, which is further confirmed by the MFM analysis. The relevant mechanism is discussed by considering the diffusion of boron atoms and the consequential in-plane tensile stress.
Abstract：FePt multilayer films with a boron underlayer are prepared on Si (100) substrates using magnetron sputtering and vacuum annealing is carried out to obtain the hard magnetic L10 phase. According to the microstructural and magnetic measurement results, the ordering of the FePt films is facilitated at low annealing temperatures while it is blocked at high ones by introducing boron. Moreover, (001) orientation of the samples is obviously improved by inserting a boron underlayer, which is further confirmed by the MFM analysis. The relevant mechanism is discussed by considering the diffusion of boron atoms and the consequential in-plane tensile stress.
LI Yong-Le;HUANG An-Ping;FENG Tang-Fu;CHEN Qiang;SHU Xiao-Lin;CHEN Jun-Yang;CHEN Zi-Yu;**
. Effect of a Boron Underlayer on the Ordering and Orientation of Sputtered FePt Film[J]. 中国物理快报, 2011, 28(6): 67502-067502.
LI Yong-Le, HUANG An-Ping, FENG Tang-Fu, CHEN Qiang, SHU Xiao-Lin, CHEN Jun-Yang, CHEN Zi-Yu, **
. Effect of a Boron Underlayer on the Ordering and Orientation of Sputtered FePt Film. Chin. Phys. Lett., 2011, 28(6): 67502-067502.
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2011, Vol. 28 
