Second Harmonic Generation in Scanning Probe Microscopy for Edge Localization
HU Xiao-Gen**, LI Yu-He**, LIN Hao-Shan, WANG Dong-Sheng, QI Xin
State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084
Second Harmonic Generation in Scanning Probe Microscopy for Edge Localization
HU Xiao-Gen**, LI Yu-He**, LIN Hao-Shan, WANG Dong-Sheng, QI Xin
State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084
摘要We present an approach of second harmonic generation for edge localization of nano-scale defects measurement, based on the impact of the oscillating tip on the sample that induces higher harmonics of the excitation frequency. The harmonic signals of tip motion are measured by the heterodyne interferometry. The edge amplitude ratio for the edge characterization can be calculated by a mechanics model and the threshold of edge localization is experimentally determined by second harmonic profiles. This approach has been successfully utilized to measure the pitch of a standard sample. The results show that the second harmonic is sensitive to locating the edge of nano-scale defects with high accuracy.
Abstract：We present an approach of second harmonic generation for edge localization of nano-scale defects measurement, based on the impact of the oscillating tip on the sample that induces higher harmonics of the excitation frequency. The harmonic signals of tip motion are measured by the heterodyne interferometry. The edge amplitude ratio for the edge characterization can be calculated by a mechanics model and the threshold of edge localization is experimentally determined by second harmonic profiles. This approach has been successfully utilized to measure the pitch of a standard sample. The results show that the second harmonic is sensitive to locating the edge of nano-scale defects with high accuracy.
(General theories and models of atomic and molecular collisions and interactions (including statistical theories, transition state, stochastic and trajectory models, etc.))
HU Xiao-Gen**;LI Yu-He**;LIN Hao-Shan;WANG Dong-Sheng;QI Xin
. Second Harmonic Generation in Scanning Probe Microscopy for Edge Localization[J]. 中国物理快报, 2011, 28(4): 43402-043402.
HU Xiao-Gen**, LI Yu-He**, LIN Hao-Shan, WANG Dong-Sheng, QI Xin
. Second Harmonic Generation in Scanning Probe Microscopy for Edge Localization. Chin. Phys. Lett., 2011, 28(4): 43402-043402.
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2011, Vol. 28 
