中国物理快报  2011, Vol. 28 Issue (3): 36105-036105    DOI: 10.1088/0256-307X/28/3/036105
  CONDENSED MATTER: STRUCTURE, MECHANICAL AND THERMAL PROPERTIES 本期目录 | 过刊浏览 | 高级检索 |
Influence of Oxygen in Sputtering and Annealing Processes on Properties of ZnO:Ag Films Deposited by rf Sputtering
DUAN Li1**, GAO Wei2
1School of Materials Science and Engineering, Chang'an University, Xi'an 710064
2Department of Chemical and Materials Engineering, The University of Auckland, Private Bag 92019, Auckland, New Zealand
Influence of Oxygen in Sputtering and Annealing Processes on Properties of ZnO:Ag Films Deposited by rf Sputtering
DUAN Li1**, GAO Wei2
1School of Materials Science and Engineering, Chang'an University, Xi'an 710064
2Department of Chemical and Materials Engineering, The University of Auckland, Private Bag 92019, Auckland, New Zealand