Ultrasensitive Detection of Infrared Photon Using Microcantilever: Theoretical Analysis
CAO Li-Xin1, ZHANG Feng-Xin2,3, ZHU Yin-Fang2,3, YANG Jin-Ling2,3
1National Laboratory for Superconductivity, Institute of Physics and Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Beijing 100190 2Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083 3State Key Laboratory of Transducer Technology, Beijing 100080
Ultrasensitive Detection of Infrared Photon Using Microcantilever: Theoretical Analysis
CAO Li-Xin1, ZHANG Feng-Xin2,3, ZHU Yin-Fang2,3, YANG Jin-Ling2,3
1National Laboratory for Superconductivity, Institute of Physics and Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Beijing 100190 2Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083 3State Key Laboratory of Transducer Technology, Beijing 100080
摘要We present a new method for detecting near-infrared, mid-infrared, and far-infrared photons with an ultra-high sensitivity. The infrared photon detection was carried out by monitoring the displacement change of a vibrating microcantilever under light pressure using a laser Doppler vibrometer. Ultrathin silicon cantilevers with high sensitivity were produced using micro/nano-fabrication technology. The photon detection system was set up. The response of the microcantilever to the photon illumination is theoretically estimated, and a nanowatt resolution for the infrared photon detection is expected at room temperature with this method.
Abstract：We present a new method for detecting near-infrared, mid-infrared, and far-infrared photons with an ultra-high sensitivity. The infrared photon detection was carried out by monitoring the displacement change of a vibrating microcantilever under light pressure using a laser Doppler vibrometer. Ultrathin silicon cantilevers with high sensitivity were produced using micro/nano-fabrication technology. The photon detection system was set up. The response of the microcantilever to the photon illumination is theoretically estimated, and a nanowatt resolution for the infrared photon detection is expected at room temperature with this method.
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2010, Vol. 27 
