Effects of Annealing on Microstructure and Optical Properties of TiO2 Sculptured Thin Films
XIAO Xiu-Di1,2, DONG Guo-Ping1,2, QI Hong-Ji1,3, FAN Zheng-Xiu1, HE Hong-Bo1, SHAO Jian-Da1
1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, PO BOX 800-211, Shanghai 2018002Graduate School of the Chinese Academy of Science, Beijing 1000493Shanghai Daheng of Optics and Fine Mechanics Co., Ltd, Shanghai 201800
Effects of Annealing on Microstructure and Optical Properties of TiO2 Sculptured Thin Films
1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, PO BOX 800-211, Shanghai 2018002Graduate School of the Chinese Academy of Science, Beijing 1000493Shanghai Daheng of Optics and Fine Mechanics Co., Ltd, Shanghai 201800
摘要The evolution of microstructure and optical properties of TiO2 sculptured thin films under thermal annealing is reported. XRD, field emission SEM, UV-Vis-NIR spectra are employed to characterize the microstructural and optical properties. It is found that the optimum annealing temperature for linear birefringence is 500°C. The maximum of transmission difference for linear birefringence is up to 18%, which is more than twice of that in as-deposited thin films. In addition, the sample annealed at 500°C has a minimum of column angle about 12°C. The competitive process between the microstructural and optical properties is discussed in detail. Post-annealing is a useful method to improve the linear birefringence in sculptured thin films for practical applications.
Abstract：The evolution of microstructure and optical properties of TiO2 sculptured thin films under thermal annealing is reported. XRD, field emission SEM, UV-Vis-NIR spectra are employed to characterize the microstructural and optical properties. It is found that the optimum annealing temperature for linear birefringence is 500°C. The maximum of transmission difference for linear birefringence is up to 18%, which is more than twice of that in as-deposited thin films. In addition, the sample annealed at 500°C has a minimum of column angle about 12°C. The competitive process between the microstructural and optical properties is discussed in detail. Post-annealing is a useful method to improve the linear birefringence in sculptured thin films for practical applications.
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