Measurements of Film Thickness and Growth Temperature of YBa2 Cu3 O7-δ Films by Pyrometric Absorption Method
XIONG Xu-ming, ZHOU Yue-liang, WANG Hui-sheng, CUI Da-fu, LU Hui-bin, CHEN Zheng-hao, YANG Guo-zhen
Optical Physics Laboratory, Institute of Physics, Chinese Academy of Sciences, Beijing 100080
Measurements of Film Thickness and Growth Temperature of YBa2 Cu3 O7-δ Films by Pyrometric Absorption Method
XIONG Xu-ming;ZHOU Yue-liang;WANG Hui-sheng;CUI Da-fu;LU Hui-bin;CHEN Zheng-hao;YANG Guo-zhen
Optical Physics Laboratory, Institute of Physics, Chinese Academy of Sciences, Beijing 100080
关键词 ：
68.55.Jk ,
68.55.-a ,
74.76.Bz
Abstract ： A pyrometric absorption method suitable for strongly absorbing films has been developed to monitor the YBa2 Cu3 O7-δ film growth. This method makes use of the temperature difference between the heater and the substrate. By deducing the absorption formula of radiation light and fitting it to the radiation intensity data measured, it is possible to monitor the film thickness and the film surface temperature during deposition. Experimental results show that this is a simple and practicable method.
Key words ：
68.55.Jk
68.55.-a
74.76.Bz
出版日期: 1997-05-01
引用本文:
XIONG Xu-ming;ZHOU Yue-liang;WANG Hui-sheng;CUI Da-fu;LU Hui-bin;CHEN Zheng-hao;YANG Guo-zhen. Measurements of Film Thickness and Growth Temperature of YBa2 Cu3 O7-δ Films by Pyrometric Absorption Method[J]. 中国物理快报, 1997, 14(5): 367-370.
2 Cu3 O7-δ Films by Pyrometric Absorption Method. Chin. Phys. Lett., 1997, 14(5): 367-370.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y1997/V14/I5/367
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