Growth of Structured Non-crystalline Boron-Oxygen-Nitrogen Films and Measurement of Their Electrical Properties
CHEN Guang-Chao1, LU Fan-Xiu1, J. -H. Boo2
1School of Material Science and Engineering, University of Science and Technology Beijing, Beijing 100083
2Department of Chemistry, Sungkyunkwan University, Suwon, 440-746, Korea
Growth of Structured Non-crystalline Boron-Oxygen-Nitrogen Films and Measurement of Their Electrical Properties
CHEN Guang-Chao1;LU Fan-Xiu1;J. -H. Boo2
1School of Material Science and Engineering, University of Science and Technology Beijing, Beijing 100083
2Department of Chemistry, Sungkyunkwan University, Suwon, 440-746, Korea
Abstract： The boron-oxygen-nitrogen (BON) films have been grown on Si wafer by the low-frequency rf-plasma-enhanced metal-organic chemical vapor deposition method. The homogeneous film structure of completely amorphous BON is first fabricated on a low-temperature-made buffer at 500°C with N2 plasma and is observed with a high-resolution electron microscope by the transmission electron diffraction. The results show that the interfaces among substrate/buffer/film are clear and straight in the structured film. A heterogeneous film containing nano-sized crystalline particles is also grown by a routine growth procedure as a referential structure. The C-V characteristic is measured on both the amorphous and crystal-containing films by using the metal-oxide-semiconductor structure. The dielectric constants of the films are, therefore, deduced to be 5.9 and 10.5 for the amorphous and crystal-containing films, respectively. The C-V results also indicate that more trapped charges exist in the amorphous film. The binding energy of the B, O, and N atoms in the amorphous film is higher than that in the crystal-containing one, and the N-content in the latter is found to be higher than that in the former by x-ray photo-electron spectroscopy. The different electrical property of the films is thought to originate from the energy state of the covalent electrons.
(Liquids, emulsions, and suspensions; liquid crystals)
引用本文:
CHEN Guang-Chao;LU Fan-Xiu;J. -H. Boo. Growth of Structured Non-crystalline Boron-Oxygen-Nitrogen Films and Measurement of Their Electrical Properties[J]. 中国物理快报, 2003, 20(3): 414-416.
CHEN Guang-Chao, LU Fan-Xiu, J. -H. Boo. Growth of Structured Non-crystalline Boron-Oxygen-Nitrogen Films and Measurement of Their Electrical Properties. Chin. Phys. Lett., 2003, 20(3): 414-416.
2003, Vol. 20 
