Measurement of Specimen Thickness by Using Electron Holography and Electron Dynamic Calculation with a Transmission Electron Microscope
WANG Yan-Guo1, LIU Hong-Rong2, YANG Qi-Bin2, ZHANG Ze1
1Beijing Laboratory of Electron Microscopy, Institute of Physics and Center for Condensed Matter Physics, Chinese Academy of Sciences, PO Box 603, Beijing 100080
2Institute of Modern Physics, Xiangtan University, Xiangtan 411105
Measurement of Specimen Thickness by Using Electron Holography and Electron Dynamic Calculation with a Transmission Electron Microscope
WANG Yan-Guo1; LIU Hong-Rong2;YANG Qi-Bin2;ZHANG Ze1
1Beijing Laboratory of Electron Microscopy, Institute of Physics and Center for Condensed Matter Physics, Chinese Academy of Sciences, PO Box 603, Beijing 100080
2Institute of Modern Physics, Xiangtan University, Xiangtan 411105
Abstract： A method of transmission-electron microscopy for accurate measurement of specimen thickness has been proposed based on off-axis electron holography along with the dynamic electron diffraction simulation. The phase shift of the exit object wave with respect to the reference wave in vacuum, resulting from the scattering within the specimen, has been simulated versus the specimen thickness by the dynamic electron diffraction formula. Off-axis electron holography in a field emission gun transmission electron microscope has been used to determine the phase shift of the exit wave. The specimen thickness can be obtained by match of the experimental and simulated phase shift. Based on the measured phase shift of the [110] oriented copper foil, the thickness can be determined at a good level of accuracy with an error less than ～10%.
WANG Yan-Guo; LIU Hong-Rong;YANG Qi-Bin;ZHANG Ze. Measurement of Specimen Thickness by Using Electron Holography and Electron Dynamic Calculation with a Transmission Electron Microscope[J]. 中国物理快报, 2003, 20(3): 389-391.
WANG Yan-Guo, LIU Hong-Rong, YANG Qi-Bin, ZHANG Ze. Measurement of Specimen Thickness by Using Electron Holography and Electron Dynamic Calculation with a Transmission Electron Microscope. Chin. Phys. Lett., 2003, 20(3): 389-391.
2003, Vol. 20 
