1The Key Laboratory of Opto-electronic Information Science and Technology, Institute of Modern Optics (Ministry of Education), Nankai University, Tianjin 3000712Department of Physics, Taishan University, Tai'an 271021
Generation of Optical Vortex Using a Spiral Phase Plate Fabricated in Quartz by Direct Laser Writing and Inductively Coupled Plasma Etching
1The Key Laboratory of Opto-electronic Information Science and Technology, Institute of Modern Optics (Ministry of Education), Nankai University, Tianjin 3000712Department of Physics, Taishan University, Tai'an 271021
摘要A simple, economical and reliable technique is proposed for fabricating a spiral phase plate (SPP) in a quartz substrate to generate optical vortex with a unit topological charge at the wavelengths of 632.8nm. The spiral phase plate is first formed in the photoresist by direct laser writing lithography and then transferred into the quartz substrate by inductively coupled plasma etching. The performance of the fabricated SPP is verified by using beam intensity distribution, which is in agreement with the theoretical calculation result. The interference measurement suggests that we have succeeded to generate optical vortex with a unit topological charge with the fabricated SPP.
Abstract：A simple, economical and reliable technique is proposed for fabricating a spiral phase plate (SPP) in a quartz substrate to generate optical vortex with a unit topological charge at the wavelengths of 632.8nm. The spiral phase plate is first formed in the photoresist by direct laser writing lithography and then transferred into the quartz substrate by inductively coupled plasma etching. The performance of the fabricated SPP is verified by using beam intensity distribution, which is in agreement with the theoretical calculation result. The interference measurement suggests that we have succeeded to generate optical vortex with a unit topological charge with the fabricated SPP.
CHEN Jun;KUANG Deng-Feng;GUI Min;FANG Zhi-Liang. Generation of Optical Vortex Using a Spiral Phase Plate Fabricated in Quartz by Direct Laser Writing and Inductively Coupled Plasma Etching[J]. 中国物理快报, 2009, 26(1): 14202-014202.
CHEN Jun, KUANG Deng-Feng, GUI Min, FANG Zhi-Liang. Generation of Optical Vortex Using a Spiral Phase Plate Fabricated in Quartz by Direct Laser Writing and Inductively Coupled Plasma Etching. Chin. Phys. Lett., 2009, 26(1): 14202-014202.
[1] Gan X T et al 2008 Chin. Phys. Lett. 25 3280 [2] Rao L Z et al 2008 Chin. Phys. Lett. 25 3223 [3] Beijersbergen M et al 1993 Opt. Commun. 96 123 [4] Zhao C L et al 2008 Chin. Phys. Lett. 25 1676 [5] Kuppens S et al 1998 Phys. Rev. A 58 3068 [6] Wright E M et al 2000 Phys. Rev. A 63 013608 [7] Friese M E J and Rubinsztein D H 2001 Appl. Phys.Lett. 78 547 [8] He H et al 1995 Phys. Rev. Lett. 75 826 [9] David G G 2003 Nature 424 810 [10] Guo C S et al 2005 J. Opt. Soc. Am. A 22 385 [11] Heckenberg N R et al 1992 Opt. Lett. 17 221 [12] Jennifer E C and David G G 2003 Opt. Lett. 28 872 [13] Courtial J and Padgett M J 1999 Opt. Commun. 159 13 [14] Kotlyar V V et al 2006 App. Opt. 45 2656 [15] Oemrawsingh S S R, Houwelingen J A W, Eliel E R, WoerdmanJ P, Verstegen E J K , Kloosterboer J G and Hooft G W 2004 Appl.Opt. 43 688 [16] Cheong W C, Lee W M, Yuan X C and Zhang L S 2004 App. Phys. Lett. 85 5784 [17] Vickers J, Burch M, Vyas R and Singh S 2008 J. Opt.Soc. Am. A 25 823
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