摘要Niobium-doped ZnO (NZO) transparent conductive films are deposited on glass substrates by rf sputtering at 300°C. Effects of sputtering power on the structural, morphologic, electrical, and optical properties of NZO films are investigated by x-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), Hall measurement, and optical transmission spectroscopy. The obtained films are polycrystalline with a hexagonal wurtzite structure and preferentially oriented in the (002) crystallographic direction. The minimum resistivity of 4.0×10-4Ω・cm is obtained from the film grown at the sputtering power of 170W. The average optical transmittance of the films is over 90%.
Abstract：Niobium-doped ZnO (NZO) transparent conductive films are deposited on glass substrates by rf sputtering at 300°C. Effects of sputtering power on the structural, morphologic, electrical, and optical properties of NZO films are investigated by x-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), Hall measurement, and optical transmission spectroscopy. The obtained films are polycrystalline with a hexagonal wurtzite structure and preferentially oriented in the (002) crystallographic direction. The minimum resistivity of 4.0×10-4Ω・cm is obtained from the film grown at the sputtering power of 170W. The average optical transmittance of the films is over 90%.
(Optical properties of bulk materials and thin films)
引用本文:
CAO Feng;WANG Yi-Ding;LIU Da-Li;YIN Jing-Zhi;GUO Bao-Jia;LI Lei;AN Yu-Peng. Preparation and Characterization of Transparent Conductive Nb-Doped ZnO Films by Radio-Frequency Sputtering[J]. 中国物理快报, 2009, 26(3): 34210-034210.
CAO Feng, WANG Yi-Ding, LIU Da-Li, YIN Jing-Zhi, GUO Bao-Jia, LI Lei, AN Yu-Peng. Preparation and Characterization of Transparent Conductive Nb-Doped ZnO Films by Radio-Frequency Sputtering. Chin. Phys. Lett., 2009, 26(3): 34210-034210.
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2009, Vol. 26 
