中国物理快报  2009, Vol. 26 Issue (3): 36402-036402    DOI: 10.1088/0256-307X/26/3/036402
  CONDENSED MATTER: STRUCTURE, MECHANICAL AND THERMAL PROPERTIES 本期目录 | 过刊浏览 | 高级检索 |
Physical and Chemical Properties of TiOxNy Prepared by Low-Temperature Oxidation of Ultrathin Metal Nitride Directly Deposited on SiO2
HAN Yue-Ping, HAN Yan
National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051
Physical and Chemical Properties of TiOxNy Prepared by Low-Temperature Oxidation of Ultrathin Metal Nitride Directly Deposited on SiO2
HAN Yue-Ping, HAN Yan
National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051