Effect of Vacuum on the Laser-Induced Damage of Anti-Reflection Coatings
LING Xiu-Lan, ZHAO Yuan-An, LI Da-Wei, ZHOU Ming, SHAO Jian-Da, FAN Zheng-Xiu
1Key Laboratory of Material Science and Technology for High Power Lasers, Shanghai Institute of Optics and Fine Mechanics, Shanghai 2018002Graduate School of Chinese Academy of Sciences, Beijing 1000493Department of Information Engineering, North University of China, Taiyuan 030051
Effect of Vacuum on the Laser-Induced Damage of Anti-Reflection Coatings
LING Xiu-Lan, ZHAO Yuan-An, LI Da-Wei, ZHOU Ming, SHAO Jian-Da, FAN Zheng-Xiu
1Key Laboratory of Material Science and Technology for High Power Lasers, Shanghai Institute of Optics and Fine Mechanics, Shanghai 2018002Graduate School of Chinese Academy of Sciences, Beijing 1000493Department of Information Engineering, North University of China, Taiyuan 030051
摘要In the comparison of damage modifications, absorption measurement and energy dispersive x-ray analysis, the effect of vacuum on the laser-induced damage of anti-reflection coatings is analyzed. It is found that vacuum decreases the laser-induced damage threshold of the films. The low laser-induced damage threshold in vacuum environments as opposed to air environments is attributed to water absorption and the formation of the O/Si, O/Zr sub-stoichiometry in the course of laser irradiation.
Abstract：In the comparison of damage modifications, absorption measurement and energy dispersive x-ray analysis, the effect of vacuum on the laser-induced damage of anti-reflection coatings is analyzed. It is found that vacuum decreases the laser-induced damage threshold of the films. The low laser-induced damage threshold in vacuum environments as opposed to air environments is attributed to water absorption and the formation of the O/Si, O/Zr sub-stoichiometry in the course of laser irradiation.
[1] Riede W and Allenspacher P 2005 SPIE 5991599128 [2] Riede W and Allenspacher P 2007 SPIE 640364030T [3] Burnham A K, Runkel M, Demos S G, Kozlowski M R andWegne P J 2000 SPIE 4134 243 [4] Becker S, Pereira A, Bouchut P, Geffraye F and Anglade C2007 SPIE 5991 64030J [5] Scurlock C 2004 SPIE 5647 82 [6] ISO 11254-1 2000 Determination of Laser-InducedDamage Threshold of Optical Surfaces Part 1:1-on-1 test
2009, Vol. 26 
