Preparation and Thermal Characterization of Diamond-Like Carbon Films
BAI Su-Yuan1,2, TANG Zhen-An1, HUANG Zheng-Xing1, Yu Jun1, WANG Jing3, LIU Gui-Chang3
1Department of Electronic Engineering, Dalian University of Technology, Dalian 1160242School of Physics and Electronic Technology, Liaoning Normal University, Dalian 1160293School of Chemical Engineering, Dalian University of Technology, Dalian 116012
Preparation and Thermal Characterization of Diamond-Like Carbon Films
BAI Su-Yuan1,2, TANG Zhen-An1, HUANG Zheng-Xing1, Yu Jun1, WANG Jing3, LIU Gui-Chang3
1Department of Electronic Engineering, Dalian University of Technology, Dalian 1160242School of Physics and Electronic Technology, Liaoning Normal University, Dalian 1160293School of Chemical Engineering, Dalian University of Technology, Dalian 116012
摘要Diamond-like carbon (DLC) films are prepared on silicon substrates by microwave electron cyclotron resonance plasma enhanced chemical vapor deposition. Raman spectroscopy indicates that the films have an amorphous structure and typical characteristics. The topographies of the films are presented by AFM images. Effective thermal conductivities of the films are measured using a nanosecond pulsed photothermal reflectance method. The results show that thermal conductivity is dominated by the microstructure of the films.
Abstract：Diamond-like carbon (DLC) films are prepared on silicon substrates by microwave electron cyclotron resonance plasma enhanced chemical vapor deposition. Raman spectroscopy indicates that the films have an amorphous structure and typical characteristics. The topographies of the films are presented by AFM images. Effective thermal conductivities of the films are measured using a nanosecond pulsed photothermal reflectance method. The results show that thermal conductivity is dominated by the microstructure of the films.
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2009, Vol. 26 
