Tunable Anisotropic Absorption of Ag-Embedded SiO2 Thin Films by Oblique Angle Deposition
XIAO Xiu-Di1,2, DONG Guo-Ping1,2, SHAO Jian-Da1, FAN Zheng-Xiu1, HE Hong-Bo1, QI Hong-Ji1,3
1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, Shanghai 2018002Graduate School of Chinese Academy of Sciences, Beijing 1000493Shanghai Daheng of Optics and Fine Mechanics Co., Ltd, Shanghai 201800
Tunable Anisotropic Absorption of Ag-Embedded SiO2 Thin Films by Oblique Angle Deposition
XIAO Xiu-Di1,2, DONG Guo-Ping1,2, SHAO Jian-Da1, FAN Zheng-Xiu1, HE Hong-Bo1, QI Hong-Ji1,3
1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, Shanghai 2018002Graduate School of Chinese Academy of Sciences, Beijing 1000493Shanghai Daheng of Optics and Fine Mechanics Co., Ltd, Shanghai 201800
摘要Ag-embedded SiO2 thin films are prepared by oblique angle deposition. Through field emission scanning electron microscopy (SEM), an orientated slanted columnar structure is observed. Energy-dispersive x-ray (EDX) analysis shows the Ag concentration is about 3% in the anisotropic SiO2 matrix. Anisotropic surface plasma resonance (SPR) absorption is observed in the Ag-embedded SiO2 thin films, which is dependent on polarization state and incidence angle of two orthogonal polarized lights and the deposition angle. This means that optical properties and anisotropic SPR absorption can be tunable in Ag-embedded SiO2 thin films. Broadband polarization splitting is also observed and the transmission ratio Tp/Ts between p-and s-polarized lights is up to 2.7 for thin films deposited at α=70°, which means that Ag-embedded SiO2 thin films are a promising candidate for thin film polarizers.
Abstract：Ag-embedded SiO2 thin films are prepared by oblique angle deposition. Through field emission scanning electron microscopy (SEM), an orientated slanted columnar structure is observed. Energy-dispersive x-ray (EDX) analysis shows the Ag concentration is about 3% in the anisotropic SiO2 matrix. Anisotropic surface plasma resonance (SPR) absorption is observed in the Ag-embedded SiO2 thin films, which is dependent on polarization state and incidence angle of two orthogonal polarized lights and the deposition angle. This means that optical properties and anisotropic SPR absorption can be tunable in Ag-embedded SiO2 thin films. Broadband polarization splitting is also observed and the transmission ratio Tp/Ts between p-and s-polarized lights is up to 2.7 for thin films deposited at α=70°, which means that Ag-embedded SiO2 thin films are a promising candidate for thin film polarizers.
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2009, Vol. 26 
