Fabrication of 3D Templates Using a Large Depth of Focus Femtosecond Laser
LI Xiao-Fan1,3, WINFIELD Richard2, O'BRIEN Shane2, CHEN Liang-Yao1
1Department of Optical Science and Engineering, Fudan University, Shanghai 2004332Tyndall National Institute, Lee Maltings, Prospect Row, Cork, Ireland3Department of Microelectronic Engineering, University College Cork, Cork, Ireland
Fabrication of 3D Templates Using a Large Depth of Focus Femtosecond Laser
LI Xiao-Fan1,3, WINFIELD Richard2, O'BRIEN Shane2, CHEN Liang-Yao1
1Department of Optical Science and Engineering, Fudan University, Shanghai 2004332Tyndall National Institute, Lee Maltings, Prospect Row, Cork, Ireland3Department of Microelectronic Engineering, University College Cork, Cork, Ireland
摘要We report the use of a large depth of focus Bessel beam in the fabrication of cell structures. Two axicon lenses are investigated in the formation of high aspect ratio line structures. A sol-gel resin, with good mechanical strength, is polymerised in a modified two-photon polymerisation system. Examples of different two-dimensional grids are presented to show that the lateral resolution can be maintained even in the rapid fabrication of high-sided structures.
Abstract：We report the use of a large depth of focus Bessel beam in the fabrication of cell structures. Two axicon lenses are investigated in the formation of high aspect ratio line structures. A sol-gel resin, with good mechanical strength, is polymerised in a modified two-photon polymerisation system. Examples of different two-dimensional grids are presented to show that the lateral resolution can be maintained even in the rapid fabrication of high-sided structures.
LI Xiao-Fan;WINFIELD Richard;O'BRIEN Shane;CHEN Liang-Yao. Fabrication of 3D Templates Using a Large Depth of Focus Femtosecond Laser[J]. 中国物理快报, 2009, 26(9): 94203-094203.
LI Xiao-Fan, WINFIELD Richard, O'BRIEN Shane, CHEN Liang-Yao. Fabrication of 3D Templates Using a Large Depth of Focus Femtosecond Laser. Chin. Phys. Lett., 2009, 26(9): 94203-094203.
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2009, Vol. 26 
