摘要ZnO/TiO2 composite nanofibers are synthesized by an electrospinning method and characterized by x-ray diffraction, scanning electron microscopy, and transmission electron microscopy. A micro humidity sensor is fabricated by spinning the precursors of these nanofibers on a ceramic substrate with Ag-Pd interdigitated electrodes. Humidity sensing investigation reveals that this micro sensor offers high sensitivity and quick response/recovery at an operating frequency of 100 Hz. The corresponding impedance changes more than four orders of magnitude within the whole humidity range from 10% to 90% relative humidity (RH), and the response and recovery times are about 4 and 12 s, respectively. The maximum hysteresis is around 2% RH. The humidity sensing mechanism is also discussed based on the nanofiber structure and morphology.
Abstract:ZnO/TiO2 composite nanofibers are synthesized by an electrospinning method and characterized by x-ray diffraction, scanning electron microscopy, and transmission electron microscopy. A micro humidity sensor is fabricated by spinning the precursors of these nanofibers on a ceramic substrate with Ag-Pd interdigitated electrodes. Humidity sensing investigation reveals that this micro sensor offers high sensitivity and quick response/recovery at an operating frequency of 100 Hz. The corresponding impedance changes more than four orders of magnitude within the whole humidity range from 10% to 90% relative humidity (RH), and the response and recovery times are about 4 and 12 s, respectively. The maximum hysteresis is around 2% RH. The humidity sensing mechanism is also discussed based on the nanofiber structure and morphology.
XU Lei;WANG Rui**;XIAO Qi;ZHANG Dan;LIU Yong
. Micro Humidity Sensor with High Sensitivity and Quick Response/Recovery Based on ZnO/TiO2 Composite Nanofibers[J]. 中国物理快报, 2011, 28(7): 70702-070702.
XU Lei, WANG Rui**, XIAO Qi, ZHANG Dan, LIU Yong
. Micro Humidity Sensor with High Sensitivity and Quick Response/Recovery Based on ZnO/TiO2 Composite Nanofibers. Chin. Phys. Lett., 2011, 28(7): 70702-070702.
[1] Wan Q, Li Q H, Chen Y J, Wang T H, He X L, Gao X G and Li J P 2004 Appl. Phys. Lett. 84 3085
[2] Wang X H, Wang X L, Feng C, Xiao H L, Yang C B, Wang J X, Wang B Z, Ran J X and Wang C M 2008 Chin. Phys. Lett. 25 266
[3] Nitta T 1981 Ind. Eng. Chem. Prod. Res. Dev. 20 669
[4] Zhang X, McGill S A and Xiong P 2007 J. Am. Chem. Soc. 129 14470
[5] Qiu C J, Dou Y W, Zhao Q L, Qu W, Yuan J, Sun Y M and Cao M S 2008 Chin. Phys. Lett. 25 3590
[6] Li K, Liu H, Zhang Q C, Xue C G and Wu X P 2007 Chin. Phys. Lett. 24 1502
[7] Kuang Q, Lao C, Wang Z L, Xie Z and Zheng L 2007 J. Am. Chem. Soc. 129 6070
[8] Traversa E 1995 Sens. Actuat. B 23 135
[9] Qi Q, Zhang T, Liu L and Zheng X 2009 Sens. Actuat. B 137 471
[10] Huang X J and Choi Y K 2007 Sens. Actuat. B 122 659
[11] Liu L, Zhang T, Wang Z J, Li S C, Tian Y X and Li W 2009 Chin. Phys. Lett. 26 090701
[12] Kong J, Franklin N R, Zhou C, Chapline M G, Peng S, Cho K and Dai H 2000 Science 287 622
[13] Qi P, Vermesh O, Grecu M, Javey A, Wang Q and Dai H 2003 Nano. Lett. 3 347
[14] Zhang Z, Hu C, Xiong Y, Yang R and Wang Z L 2007 Nanotechnology 18 465504
[15] Xu L, Wang R, Liu Y and Dong L 2011 Chin. Phys. Lett. 28 040701
[16] Xu L, Wang R, Liu Y, Zhang D and Xiao Q 2011 Chin. Sci. Bull. 56 1535
[17] Xu L, Wang R, Zhang S J and Yang Q H 2009 Proceedings of the Fiber Society 2009 Spring Conference vol I and II p 998
[18] Zhang H, Li Z, Liu L, Xu X, Wang Z, Wang W, Zheng W, Dong B and Wang C 2010 Sens. Actuat. B 147 111
[19] Wang D W, Cao M S, Yuan J, Zhao Q L, Li H B and Zhang D Q 2011 J. Am. Chem. Soc. 94 647
[20] Wang L N, Fang X Y, Hou Z L, Li Y L, Wang K, Yuan J and Cao M S 2011 Chin. Phys. Lett. 28 027101
[21] Zhou Y, Kang Y Q, Fang X Y, Yuan J, Shi X L, Song W L and Cao M S 2008 Chin. Phys. Lett. 25 1902
[22] Fang X Y, Cao M S, Shi X L, Hou Z L, Song W L and Yuan J 2010 J. Appl. Phys. 107 054304
[23] Cao M S, Shi X L, Fang X Y, Jing H B, Hou Z L, Zhou W and Chen Y J 2007 Appl. Phys. Lett. 91 203110
[24] Creiner A and Wedorff J H 2007 Angew. Chem. Int. Ed. 46 5670
[25] Franke M E, Koplin T J and Simon U 2006 Small 2 36
[26] Qi Q, Zhang T, Yu Q, Wang R, Zeng Y, Liu L and Yang H 2008 Sens. Actuat. B 133 638
[27] Li D and Xia Y 2004 Adv. Mater. 16 1151
[28] Grasset F, Molard Y, Cordier S, Dorson F, Mortier M, Perrin C, Guilloux-Viry M, Sasaki T and Haneda H 2008 Adv. Mater. 20 1710
[29] Qi Q, Feng Y, Zhang T, Zheng X and Lu G 2009 Sens. Actuat. B 139 611
[30] Bavykin D V, Friedrich J M and Walsh F C 2006 Adv. Mater. 18 2807
[31] Liang Y X, Chen Y J and Wang T H 2004 Appl. Phys. Lett. 85 666
[32] Schaub R, Thostrup P, Lopez N, Lagsgaard E, Stensgaard I, Norskov J K and Besenbacher F 2001 Phys. Rev. Lett. 87 266104
[33] Kim K W, Cho P S, Kim S J, Lee J H, Kang C Y, Kim J S and Yoon S J 2007 Sens. Actuat. B 123 318
[34] Yu J H and Cho G M 1999 Sens. Actuat. B 61 59
[35] Huang J and Wan Q 2009 Sensors 9 9903