中国物理快报  2010, Vol. 27 Issue (2): 27703-027703    DOI: 10.1088/0256-307X/27/2/027703
  CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES 本期目录 | 过刊浏览 | 高级检索 |
Influence of Radio-Frequecy Power on Structural and Electrical Properties of Sputtered Hafnium Dioxide Thin Films
LIU Wen-Ting, LIU Zheng-Tang, TAN Ting-Ting, YAN Feng
School of Materials Science and Engineering, Northwestern Polytechnical University, Xi'an 710072
Influence of Radio-Frequecy Power on Structural and Electrical Properties of Sputtered Hafnium Dioxide Thin Films
LIU Wen-Ting, LIU Zheng-Tang, TAN Ting-Ting, YAN Feng
School of Materials Science and Engineering, Northwestern Polytechnical University, Xi'an 710072