摘要The anomalous phenomenon of generation current IGD in the lightly doped drain (LDD) nMOSFET measured under the drain bias VD-step mode is reported. We propose an assumption of activated (A) and frozen (F) traps for the VD-step mode: The A traps contributes to IGD while the F process can make them lose the roles as generation centers. The A and F regions can form the F-A region. The comparison of the F and A regions decides the role of the F-A region. The experiments confirm the assumption.
Abstract:The anomalous phenomenon of generation current IGD in the lightly doped drain (LDD) nMOSFET measured under the drain bias VD-step mode is reported. We propose an assumption of activated (A) and frozen (F) traps for the VD-step mode: The A traps contributes to IGD while the F process can make them lose the roles as generation centers. The A and F regions can form the F-A region. The comparison of the F and A regions decides the role of the F-A region. The experiments confirm the assumption.
MA Xiao-Hua;GAO Hai-Xia;CAO Yan-Rong;CHEN Hai-Feng;HAO Yue. The Anomalous Effect of Interface Traps on Generation Current in Lightly Doped Drain nMOSFET's
[J]. 中国物理快报, 2010, 27(5): 57301-057301.
MA Xiao-Hua, GAO Hai-Xia, CAO Yan-Rong, CHEN Hai-Feng, HAO Yue. The Anomalous Effect of Interface Traps on Generation Current in Lightly Doped Drain nMOSFET's
. Chin. Phys. Lett., 2010, 27(5): 57301-057301.
[1] Speckbacher P, Asenov A, Bollu M, Koch F and Weber W 1990 IEEE Electron Device Lett. 11 95 [2] Chen H F, Hao Y, Ma X H, Zhang J C, Li K, Cao Y R, Zhang J F and Zhou P J 2006 Chin. Phys. 15 645 [3] Chen H F, Hao Y, Ma X H, Tang Y, Meng Z Q, Cao Y R and Zhou P J 2007 Acta Phys. Sin. 56 1662 (in Chinese) [4] Lim T and Kim Y 2008 Electron. Lett. 44 157 [5] Verzi B and Aum P 1994 Proc. IEEE 7 141 [6] Suzuki H, Kojima M and Nara Y 1999 Proc. IEEE 12 121 [7] Spiegel J D and Declerck G J 1981 Solid-State Electron. 24 869 [8] Badih E K and Bombard R J 1985 Introduction to VLSI Silicon Devices: Physics, Technology and Characterization (Bosten: Kluwer Academic) p 387