中国物理快报  2008, Vol. 25 Issue (9): 3346-3349    
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Effect of Al Doping on Properties of SiC Films
SU Jian-Feng, YAO Ran, ZHONG Ze, FU Zhu-Xi
Department of Physics, University of Science and Technology of China, Hefei 230026
Effect of Al Doping on Properties of SiC Films
SU Jian-Feng, YAO Ran, ZHONG Ze, FU Zhu-Xi
Department of Physics, University of Science and Technology of China, Hefei 230026