Synthesis of β-FeSi2 Film by Reactive Deposition-Solid Phase Epitaxy
WANG Lianwei, SHEN Qinwo, CHEN Xiangdong, LIN Xian, LIN Chenglu, ZOU Shichang
State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050
Synthesis of β-FeSi2 Film by Reactive Deposition-Solid Phase Epitaxy
WANG Lianwei;SHEN Qinwo;CHEN Xiangdong;LIN Xian;LIN Chenglu;ZOU Shichang
State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050
关键词 ：
68.55.Eg ,
68.55.Bd ,
68.55.Jk ,
68.55.Nq
Abstract ： Reactive deposition-solid phase epitaxy has been developed for the epitaxial growth of thick β-FeSi2 film. Compared with the solid phase epitaxy, the crystal quality was improved. The orientation relationship mainly depends on the depositing condition. Observation by transmission electron microscope revealed the polycrystalline nature and the mean crystallite size was about 200nm.
Key words ：
68.55.Eg
68.55.Bd
68.55.Jk
68.55.Nq
出版日期: 1995-05-01
引用本文:
WANG Lianwei;SHEN Qinwo;CHEN Xiangdong;LIN Xian;LIN Chenglu;ZOU Shichang. Synthesis of β-FeSi2 Film by Reactive Deposition-Solid Phase Epitaxy[J]. 中国物理快报, 1995, 12(5): 301-304.
2 Film by Reactive Deposition-Solid Phase Epitaxy. Chin. Phys. Lett., 1995, 12(5): 301-304.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y1995/V12/I5/301
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1995, Vol. 12 
