Optical Planar Waveguides in KTiOPO4 Crystals by MeV Oxygen Ion Implantation
CHEN Feng1, WANG Xue-Lin1, WANG Ke-Ming1, WANG Lei1, JIAO Yang1, WANG Liang-Ling1, LU Qing-Ming2, MA Hong-Ji3, NIE Rui3
1School of Physics and Microelectronics, Shandong University, Jinan 250100
2School of Chemistry and Chemical Engineering, Shandong University, Jinan 250100
3Department of Technical Physics and the Key Laboratory of Heavy Ion Physics of MOE, Peking University, Beijing 100871
Optical Planar Waveguides in KTiOPO4 Crystals by MeV Oxygen Ion Implantation
1School of Physics and Microelectronics, Shandong University, Jinan 250100
2School of Chemistry and Chemical Engineering, Shandong University, Jinan 250100
3Department of Technical Physics and the Key Laboratory of Heavy Ion Physics of MOE, Peking University, Beijing 100871
Abstract： We report on the optical planar waveguide formation in KTiOPO4 crystals by single or double oxygen ion implantation at energies of 2.4--3.0MeV and doses of 1015ions/cm2. The dark-line spectroscopy properties are investigated by a prism-coupling method. With an effective refractive index method, the refractive index profiles of the waveguides are reconstructed. The program code TRIM’98 (transport of ions in matter) is used to simulate the implantation process of oxygen ions into the KTiOPO4 crystal. It is found that an inherent relationship exists between the nuclear damage and the refractive index changes induced by the ion-beam implantation.
CHEN Feng;WANG Xue-Lin;WANG Ke-Ming;WANG Lei;JIAO Yang;WANG Liang-Ling;LU Qing-Ming;MA Hong-Ji;NIE Rui. Optical Planar Waveguides in KTiOPO4 Crystals by MeV Oxygen Ion Implantation[J]. 中国物理快报, 2006, 23(6): 1501-1503.
CHEN Feng, WANG Xue-Lin, WANG Ke-Ming, WANG Lei, JIAO Yang, WANG Liang-Ling, LU Qing-Ming, MA Hong-Ji, NIE Rui. Optical Planar Waveguides in KTiOPO4 Crystals by MeV Oxygen Ion Implantation. Chin. Phys. Lett., 2006, 23(6): 1501-1503.
2006, Vol. 23 
