中国物理快报  2006, Vol. 23 Issue (6): 1533-1535    
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Deposition of TiN Films by Novel Filter Cathodic Arc Technique
NIU Er-Wu, FAN Song-Hua, LI Li, LU Guo-Hua, FENG Wen-Ran, ZHANG Gu-Ling, YANG Si-Ze
Institute of Physics, Chinese Academy of Sciences, Beijing 100080
Deposition of TiN Films by Novel Filter Cathodic Arc Technique
NIU Er-Wu;FAN Song-Hua;LI Li;LU Guo-Hua;FENG Wen-Ran;ZHANG Gu-Ling;YANG Si-Ze
Institute of Physics, Chinese Academy of Sciences, Beijing 100080