Near Infrared Photoluminescence from Yb,Al Co-implanted SiO2 Films on Silicon
ZHANG Jian-Guo, WANG Xiao-Xin, CHENG Bu-Wen, YU Jin-Zhong, WANG Qi-Ming
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
Near Infrared Photoluminescence from Yb,Al Co-implanted SiO2 Films on Silicon
ZHANG Jian-Guo; WANG Xiao-Xin; CHENG Bu-Wen;YU Jin-Zhong; WANG Qi-Ming
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
关键词 :
61.72.Tt ,
78.55.2m ,
76.30.Kg
Abstract : Intense room-temperature near infrared (NIR) photoluminescence (980nm and 1032nm) is observed from Yb,Al co-implanted SiO2 films on silicon. The optical transitions occur between the 2 F5/2 and 2 F7/2 levels of Yb3+ in SiO2 . The additional Al-implantation into SiO2 films can effectively improve the concentration quenching effect of Yb3+ in SiO2 . Photoluminescence excitation spectroscopy shows that the NIR photoluminescence is due to the non-radiative energy transfer from Al-implantation-induced non-bridging oxygen hole defects in SiO2 to Yb3+ in the Yb-related luminescent complexes. It is believed that the defect-mediated luminescence of rare-earth ions in SiO2 is very effective.
Key words :
61.72.Tt
78.55.2m
76.30.Kg
出版日期: 2006-08-01
引用本文:
ZHANG Jian-Guo; WANG Xiao-Xin; CHENG Bu-Wen;YU Jin-Zhong; WANG Qi-Ming. Near Infrared Photoluminescence from Yb,Al Co-implanted SiO2 Films on Silicon[J]. 中国物理快报, 2006, 23(8): 2183-2186.
ZHANG Jian-Guo, WANG Xiao-Xin, CHENG Bu-Wen, YU Jin-Zhong, WANG Qi-Ming. Near Infrared Photoluminescence from Yb,Al Co-implanted SiO2 Films on Silicon. Chin. Phys. Lett., 2006, 23(8): 2183-2186.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2006/V23/I8/2183
[1]
FANG Ying-Cui;ZHANG Zhuang-Jian;SHEN Jie;LU Ming. Photoluminescence from Electron-Beam Deposited CeO2 Thin Film after High Temperature Thermal Annealing [J]. 中国物理快报, 2006, 23(7): 1919-1922.
[2]
XU Shi-Qing;FENG Ai-Ming;ZHANG Li-Yan;ZHAO Shi-Long;WANG Bao-Ling;ZHANG Jue;WANG Wei;BAO Ren-Qiang. Thermal Stability and Spectroscopic Properties of Yb3+ -Doped New Gallium--Lead--Germanate Glass [J]. 中国物理快报, 2006, 23(11): 3069-3071.
[3]
ZHANG Lin-Li;GUO Chang-Xin;ZHAO Jun-Jing;HU Jun-Tao. Photoluminescence of Eu (III)-Doped ZnO Nanopowder and Energy Transfer from ZnO to Eu(III) Ions [J]. 中国物理快报, 2005, 22(5): 1225-1227.
[4]
ZHENG Zhong-Shan;LIU Zhong-Li; ZHANG Guo-Qiang;LI Ning;FAN Kai;ZHANG En-Xia;YI Wan-Bing;CHEN Meng;WANG Xi. Effects of Techniques of Implanting Nitrogen into Buried Oxide on the Characteristics of Partially Depleted SOI PMOSFET [J]. 中国物理快报, 2005, 22(3): 654-656.
[5]
WANG Guo-Nian;DAI Shi-Xun;ZHANG Jun-Jie;XU Shi-Qing;HU Li-Li;JIANG Zhong-Hong. Fluorescence Lifetime Increasing with F- Ions into Ytterbium-Doped Germanium--Lead--Tellurite Glasses [J]. 中国物理快报, 2005, 22(2): 457-459.
[6]
GAO Yuan;NIE Qiu-Hua;XU Tie-Feng;SHEN Xiang. Thermal Stability and Spectroscopic Properties of New Er3+ /Yb3+ -Codoped Tellurite Glasses [J]. 中国物理快报, 2004, 21(9): 1799-1801.
[7]
ZHANG En-Xia;YI Wan-Bing;LIU Xiang-Hua;CHEN Meng;LIU Zhong-Li;Wang Xi. Silicon-on-Insulating Multi-Layers for Total-Dose Irradiation Hardness [J]. 中国物理快报, 2004, 21(8): 1600-1603.
[8]
WANG Xue-Lin;CHEN Feng;LU Fei;FU Gang;LI Shi-Ling;WANG Ke-Ming;ZHANG Huai-Jin;SHEN Ding-Yu;MA Hong-Ji;NIE Rui. Barrier Optical Waveguide Formation in La3 Ga5 SiO14 Crystals by High Energy Carbon Ion Implantation [J]. 中国物理快报, 2004, 21(5): 867-869.
[9]
XU Shi-Qing;ZHANG Jun-Jie;WANG Guo-Nian;DAI Shi-Xun;HU Li-Li;JIANG Zhong-Hong. Blue Upconversion Luminescence in Tm3+ /Yb3+ -Codoped Lead Chloride Tellurite Glass [J]. 中国物理快报, 2004, 21(5): 927-929.
[10]
SHEN Xiang;NIE Qiu-Hua;XU Tie-Feng;PENG Tao;GAO Yuan. Mechanisms and Concentration Dependence of Upconversion Fluorescence in Er3+ and Tm3+ Codoped Tellurite Glasses [J]. 中国物理快报, 2004, 21(12): 2507-2510.
[11]
LI Dong-Sheng;YANG De-Ren;E. Leoni;S. Binetti;S. Pizzini. Photoluminescence of Dislocations in Nitrogen Doped Czochralski Silicon [J]. 中国物理快报, 2004, 21(11): 2242-2244.
[12]
YI Wan-Bing;CHEN Jing;CHEN Meng;WANG Xi;ZOU Shi-Chang. Effect of Hydrogen Implantation on SIMOX SOI Materials [J]. 中国物理快报, 2004, 21(1): 149-152.
[13]
WANG Guo-Nian;XU Shi-Qing;YANG Jian-Hu;DAI Shi-Xun;ZHANG Jun-Jie;HU Li-Li;JIANG Zhong-Hong. Thermal Stability and Spectroscopic Properties of Yb:Zinc-Tungsten-Tellurite Glass [J]. 中国物理快报, 2004, 21(1): 173-175.
[14]
XU Shi-Qing;YANG Zhong-Min;DAI Shi-Xun;YANG Jian-Hu;WEN Lei;HU Li-Li;JIANG Zhong-Hong. Spectral Properties of Erbium-Doped Oxyfluoride Silicate Glasses for Broadband Optical Amplifiers [J]. 中国物理快报, 2003, 20(6): 905-908.
[15]
CHEN Guo-Rong;YANG Yun-Xia;QIU Jian-Rong;JIANG Xiong-Wei;K. Hirao. Formation of Infrared Femtosecond Laser Induced Colour Centers
in Tb3+ -Doped and Tb3+ /Ce3+ -Codoped Heavy Germanate Glasses [J]. 中国物理快报, 2003, 20(11): 1997-2000.